Transducers 2013

Galo's paper in Transducers 2013

2/15/2013

Transducers 2013 & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems is considered as one of the most prestigious conferences in the MEMS community and this year with 15% acceptace rate for oral presentation Galo et al made it through:​G. T. Sevilla, J. P. Rojas, S. Ahmed, A. Hussain, S. B. Inayat and M. M. Hussain, “Silicon Fabric for Multi-Functional Applications”, Transducers 2013 & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, Barcelona, Spain, 16thto 20th Jun 2013.

We have reported a generic process flow to fabricate mechanically flexible and optically semitransparent thermoelectric generators (TEGs), micro-lithium based batteries (mLIB) and metal-oxide-semiconductor capacitors (MOSCAPs) on a mono-crystalline silicon fabric platform from standard bulk silicon (100) wafers. All the fabricated devices show outstanding mechanical flexibility and performance, making an important step towards monolithic integration of Energy Chip (self-powered devices) including energy harvesters and electronic devises on flexible platforms. Many different approaches have been reported to develop macro scalee flexible electronics, but high performance and economical solutions have not been demonstrated.